RWS Wafer Robot

FEATURES

  1. The advantage is on vertical integration of bothhardware and software, also using high precisionand stiffness DD motor, the repeatability can reach±0.02mm. Small circling radial and high utilizationof space.
  2. Applications include: Pick –and –place equipment inSemiconductor industry(pick-and place of wafer),Optoelectronics(mini panel, mini solar panel)andLED industry(sapphire substrate, rubber ring).
  3. Various options for end effectors such as vacuumtype, gripping type and flipping type. Able to providetotal solution to adapt to all kinds of customerapplications.